Rarefied gas analysis with radiation and heat conduction analysis

Computational conditions

Rarefied gas analysis with radiation and heat conduction analysis (1) The temperature distribution on the nozzle wall is calculated using the HTRM3D (radiation and heat conduction analysis) module. The temperature of the substrate and crucible is given, and calculations are performed taking into account heat conduction and radiation. (2) The RGS3D (rarefied gas dynamics analysis) module is used to calculate the adsorption distribution on the nozzle wall and the film thickness distribution on the substrate.At this point, the adsorption rate of evaporated molecules is given as a function of wall temperature. The model shape, boundary conditions, mesh model, and monitor elements are shown.

Result

  • Boundary conditions

    Boundary conditions

  • Mesh,Monitoring element

    Mesh,Monitoring element

  • Temperature-time change of monitor elements

    Temperature-time change of monitor elements

  • Temperature distribution on the nozzle wall surface

    Temperature distribution on the nozzle wall surface

  • Adsorp. flux dist. on the nozzle wall surface

    Adsorp. flux dist. on the nozzle wall surface

  • Temperature dependence of adsorption rate

    Temperature dependence of adsorption rate

  • Pressure distribution of evaporated molecules (log scale)

    Pressure distribution of evaporated molecules (log scale)

  • Adsorption flux distribution on substrate ∝ Film thickness distribution

    Adsorption flux distribution on substrate ∝ Film thickness distribution

  • Density distribution of evaporated molecules (linear scale)

    Density distribution of evaporated molecules (linear scale)

  • Temperature distribution of evaporated molecules

    Temperature distribution of evaporated molecules