Magnetic field analysis in a magnetron sputtering device

Computational conditions

Parameters of magnets

• Residual magnetic flux density Br 1.0T
• Coercive force bHc 8500 Oe

Result

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  Lines of magnetic force

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  Magnetic flux density

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  Horizontal componet of magnetic flux density

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  Horizontal componet of magnetic flux density on target

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  Vertical componet of magnetic flux density

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  Vertical componet of magnetic flux density on target