Validation (2) in CCP/GEC reactor

Computational conditions

Validation (2) in CCP/GEC reactor

Reference: Shahid Raul and Mark J. Kushner,"Argon metastable densities in radio frequency Ar,Ar/O2 and Ar/CF4 electrical discharges", Journal of Applied Physics, Vol.82,No.6,1997

Result

  • Ar(+) Ionization rate and electron density

    Ar(+) Ionization rate and electron density

  • Plasma potential and electron temperature

    Plasma potential and electron temperature

  • Ar(+) Ionization rate and electron density

    Ar(+) Ionization rate and electron density

  • Ar(4s) Density

    Ar(4s) Density

  • Ar(4s) distribution on electrode egde

    Ar(4s) distribution on electrode egde