Plasma calculation in a GEC Reference Cell type device

Computational conditions

  • 2D cylindrical coordinates
  • Ar pressure 50mTorr
  • Electrode Vrf = 50V, frequency 13.56MHz

Result

  • Electron density

    Electron density

  • Electron temperature

    Electron temperature

  • Ionization rate distribution

    Ionization rate distribution

  • History of electron density in monitoring cells

    History of electron density in monitoring cells

  • Electron energy

    Electron energy

  • Electron flux

    Electron flux

  • History of inonization rate in monitoring cells

    History of inonization rate in monitoring cells

  • Electron energy distribution in monitoring cells

    Electron energy distribution in monitoring cells

  • Ion density

    Ion density

  • Ion energy

    Ion energy

  • Ionization rate

    Ionization rate

  • History of ion density

    History of ion density

  • Ion energy

    Ion energy

  • Ion flux

    Ion flux

  • History of ionization rate

    History of ionization rate

  • Ion energy distribution in monitoring cells

    Ion energy distribution in monitoring cells

  • History of number of super particles

    History of number of super particles

  • Electric potential

    Electric potential

  • History of electric potential in monitoring cells

    History of electric potential in monitoring cells