SASAMAL calculation example
Computational conditionsDr. Miyagawa obtained good results in the field of surface modification by high-energy from several tens Kev to few Mev and high-dose ion implantation by using SASAMAL. But here, some examples for comparably low incident ion energy, several hundreds eV, are presented for the subject of PEGASUS.
Sputtering yields for incident Ar, H and He ion onto Ni target