Rarefied gas flow analysis in a CVD equipment with shower head structure

Computational conditions

Rarefied gas flow analysis in a CVD equipment with shower head structure
  • N2 volume flow rate 300sccm
  • Exhaust port pressure 0.1Pa
  • Temperature 300K

Result

  • Model 1

    Model 1

  • Model 1 Pressure distribution in shower head structure [Pa]

    Model 1 Pressure distribution in shower head structure [Pa]

  • Model 2

    Model 2

  • Model 2 Pressure distribution in shower head structure [Pa]

    Model 2 Pressure distribution in shower head structure [Pa]

  • Model 1

    Model 1

  • Model 1 Pressure distribution on substrate

    Model 1 Pressure distribution on substrate

  • Model 2

    Model 2

  • Model 2 Pressure distribution on substrate

    Model 2 Pressure distribution on substrate

  • Model 1

    Model 1

  • Model 1 [Pa] (log スケール)

    Model 1 [Pa] (log スケール)

  • Model 2

    Model 2

  • Model 2 vertical section [Pa] (log スケール)

    Model 2 vertical section [Pa] (log スケール)