Contamination Growth Simulation

Computational conditions

Desorptionlife teim 84.0 [sec]

Collision cross section desorption : 0.0 [m2]

　　　　　　　　　　　contamination : 0.76e-20 [m2]

Diffusioncoefficient 1.5e-10

Initial density 0.0 [/m2] 　

Output times : 10000,20000,30000,40000,50000 [sec]

Carbon Molecular mass : 1.995e26 [Kg]

　　　　Mass density : 1.63e3 [Kg/m3]

Result

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  Hydrocarbon Gas Pressure

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  Electron beam shape

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  Contaminant (carbon) occupancy rate

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  Contaminant time-dependent surface morphology