Contamination Growth Simulation Module

CONTAMI2D

The Contamination Growth Simulation Module (CONTAMI2D) calculates the growth process of contamination (carbon) deposited on a sample by electron beam irradiation in hydrocarbon-based organic gases.

Description

The computational model solves a one-dimensional diffusion equation (including axisymmetric systems) considering the following elementary processes.Elementary processes include adsorption rates, desorption rates, diffusion effects on the sample surface, and contamination mutation rates due to cross-linking and polymerization of organic matter by the electron beam.

Input data

Define the geometry of the sample (substrate) in an axisymmetric model using the GUI.Set physical quantities such as organic partial pressure, gas phase temperature, desorption time constant, contamination collision cross section,desorption collision cross section, electron beam irradiation rate, and surface diffusion coefficient.

Output data

Pressure distribution of organic gas, occupancy rate of solid layer (sample: substrate, contamination: carbon),overall occupancy rate and surface morphology of solid layer, electron beam shape

Example